NSTL国家科技图书文献中心

1. Hydrogen Sensor (400 ppm - 1%) based on 20% ScAIN pyroelectric detector for a sustainable society NSTL国家科技图书文献中心

Doris K. T. Ng | Weiguo Chen ... - 《Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XVII: At SPIE OPTO.29 January - 1 February 2024.San Francisco, California, United States》 - Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications (conference) - 2024, - 128850Z.1～128850Z.6 - 共6页

摘要：We develop H_2 gas sensors based on CMOS | compatible 20% ScAlN-based pyroelectric detectors | fabricated in-house. Leveraging on the high thermal | conductivity of H_2, ScAlN-based pyroelectric detector is | used in the H_2 sensor for H_2 to conduct away

关键词： hydrogen gas sensor | pyroelectric detector | scandium aluminum nitride | CMOS compatible | sustainable | thermal conductivity

2. 地デジ帯レクテナ応用に向けた広帯域圧電薄膜トランス NSTL国家科技图书文献中心

浴田　航平 | 木下　紗理那 ... - 《電気学会研究会資料電磁界理論研究会》 - 電磁界理論研究会 - 2024, - 15～17 - 共3页

摘要：大量のセンサの普及には半永久的にワイヤレスで電力の供給をする技術が求められる。電磁波から | エネルギーを得るには、整流アンテナ(いわゆるレクテナ)を用いたRF-DC変換が一般的である。しかしながら | 、通信用の環境電磁波のような微弱なRF電圧では、ダイオードのRF-DC変換効率は著しく低下するため、昇圧 | 素子が必要である。本研究ではレクテナ昇圧用小型素子として地デジ帯(470 MHz~710 MHz)の | 周波数において比較的広帯域な圧電トランスを提案する。RFマグネトロンスパッタ法により出力側にc軸

关键词：分極反転層 | 圧電トランス | ScAIN | レクテナ | 圧電薄膜

3. Characterization of ScAlN/GaN Toward Electronic Device Application NSTL国家科技图书文献中心

Takuya Maeda | Yusuke Wakamoto ... - 《2024 IEEE BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium》 - IEEE BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium - 2024, - 1～4 - 共4页

摘要：Scandium Aluminum Nitride (ScAIN) is an | optical properties of epitaxial pseudomorphic ScAIN* with* | attractive material as a barrier layer of GaN HEMTs owing | to its ultrawide bandgap, strong polarization and | ferroelectric. In the paper, the recent progress in the

关键词： X-ray scattering | Optical polarization | Photonic band gap | Scandium | Transistors | Gallium nitride | MODFETs | Sputtering | Ellipsometry | Aluminum nitride

4. A 56 GHz Trilayer AlN/ScAlN/AlN Periodically Poled FBAR NSTL国家科技图书文献中心

Wenhao Peng | Suhyun Nam ... - 《2024 IEEE/MTT-S International Microwave Symposium,[v.1]》 - IEEE/MTT-S International Microwave Symposium - 2024, - 150～153 - 共4页

摘要：-waves. An MBE grown trilayer AIN/ScAIN/AIN thin film | to reverse the piezoelectric orientation in ScAIN | Emerging wireless communication standards call | for higher carrier frequencies, presenting | challenges to frontend filter design for 5G and beyond

关键词： Couplings | Resonator filters | Resonant frequency | Molecular beam epitaxial growth | Switches | Nonhomogeneous media | Film bulk acoustic resonators

5. 次世代高周波フィルタに向けた分極反転AlN系多層膜弾性波デバイスの開発 NSTL国家科技图书文献中心

鈴木雅視 - 《電気学会研究会資料電子材料研究会》 - 電子材料研究会 - 2024, - 91～95 - 共5页

摘要：BAW共振子の高周波動作に有効であることを明らかにした。今後は巨大圧電性ScAIN膜を用いた超多層分極 | RFマグネトロンスパッタ法を用いてAl極性AlN膜とN極性SiAlN膜を交互に積層することで | 分極反転構造が形成でき分極反転SiAlN/AlN多層膜HBARでは高次モード共振を確認した。またAlN | 単層膜より大きい膜厚と約9 GHz動作を両立する2次モード共振分極反転SiAlN/AlN膜SMRの | 形成にも成功しFEM解析で発見した分極反転構造によるデバイス性能改善を実験的に実証し分極反転構造が

关键词：分極反転 | AlN圧電膜 | スパッタ | 弾性波デバイス | 周波数フィルタ

6. Absence of genetic structure among ecologically diverse populations indicate high plasticity in a pantropical seabird NSTL国家科技图书文献中心

Mazzochi, Mariana Sc... | Muraro, Vitoria ... - 《Conservation genetics》 - 2024,25(4) - 925～938 - 共14页

摘要：Genotype and phenotype in mobile organisms can | be defined by various factors such as environmental | , biological and geographical. Brown noddies Anous stolidus | are pan-tropical seabirds breeding at different | times, with migratory and resident populations in six

关键词： Gene flow | Panmictic | Phenotypic plasticity | Reaction norm | Seabird paradox | R-PACKAGE | PHENOTYPIC PLASTICITY | BROWN NODDIES | N-E | INFERENCE...

7. Focused SO Lamb Modes for Gigahertz Delay Lines in 30% Scandium Aluminum Nitride NSTL国家科技图书文献中心

Jack Guida | Ryan Tetro ... - 《2023 IEEE International Ultrasonics Symposium (IUS 2023), Vol.3: Montreal, Quebec, Canada.3-8 September 2023》 - IEEE International Ultrasonics Symposium - 2023, - 1623～1626 - 共4页

摘要： ScAIN films theoretically supports k_t~2 up to ～40 | Scandium-doped aluminum nitride (ScAlN) is an | emergent piezoelectric material for acoustic wave devices | , exhibiting higher electromechanical coupling (k_t~2 | ) compared to undoped A1N. The SO Lamb mode in suspended

关键词： Scandium aluminum nitride (ScAIN) | Lamb mode | focusing interdigitated transducer (FIDT) | acoustic delay lines (ADLs)

8. LOW DIELECTRIC LOSS TANGENT, HIGHLY SCANDIUM DOPED ALUMINUM NITRIDE THIN FILM FOR ACOUSTIC DEVICES NSTL国家科技图书文献中心

Takahiro Higuchi | Akihiko Teshigahara ... - 《2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), Vol.1: Kyoto, Japan.25-29 June 2023》 - International Conference on Solid-State Sensors, Actuators and Microsystems - 2023, - 354～357 - 共4页

摘要：The lowest dielectric loss tangent (tanδ | ) reported so far for a scandium-doped aluminum nitride | film with 40 % scandium atomic content (Sc_(0.4)Al_ | (0.6)N) was realized on a molybdenum electrode. The | dielectric loss tangent was reduced down to 0.07 %. about

关键词： Scandium-doped aluminum nitride (ScAIN) | Dielectric loss tangent (tanδ) | Piezoelectric | Microphone | Noise

9. Performance Analysis of Wideband PMUTs: a Comparative Study Between Sol-Gel PZT, PVD PZT, and 15% ScAlN-Based Arrays Through Experimental Evaluation NSTL国家科技图书文献中心

Alessandro S. Savoia | Domenico Giusti ... - 《2023 IEEE International Ultrasonics Symposium (IUS 2023), Vol.1: Montreal, Quebec, Canada.3-8 September 2023》 - IEEE International Ultrasonics Symposium - 2023, - 613～616 - 共4页

摘要：In the design of Piezoelectric Micromachined | Ultrasonic Transducers (PMUTs) for wideband immersion | operation, the choice of piezoelectric material is crucial | for determining transducer performance. The | sensitivity, bandwidth, and maximum transmit (TX) pressure

关键词： PMUT | Ultrasonic MEMS | PZT | ScAIN | PVD | Sol-Gel | Characterization | Performance Assessment | Benchmarking

10. Influence of AlN/ScAlN piezoelectric multilayer on the electromechanical coupling of FBAR EI 工程索引 NSTL国家科技图书文献中心

Qi-Wei Yang | Re-Ching Lin ... - 《Micro and nanostructures》 - 2023,174(Feb.) - 207472.1～207472.10 - 共10页 - 被引量：3

摘要： can be enhanced by replacing the Sc doped A1N (ScAIN | the thickness ratio in A1N and ScAIN* piezoelectric* | the ScAIN* layer exhibits an optimal piezoelectric* | Based on the truth, the electromechanical | coupling in the top and bottom Mo electrodes caped A1N

摘要：We develop H_2 gas sensors based on CMOS | compatible 20% ScAlN-based pyroelectric detectors | fabricated in-house. Leveraging on the high thermal | conductivity of H_2, ScAlN-based pyroelectric detector is | used in the H_2 sensor for H_2 to conduct away

关键词： hydrogen gas sensor | pyroelectric detector | scandium aluminum nitride | CMOS compatible | sustainable | thermal conductivity

关键词：分極反転層 | 圧電トランス | ScAIN | レクテナ | 圧電薄膜

摘要：Scandium Aluminum Nitride (ScAIN) is an | optical properties of epitaxial pseudomorphic ScAIN* with* | attractive material as a barrier layer of GaN HEMTs owing | to its ultrawide bandgap, strong polarization and | ferroelectric. In the paper, the recent progress in the

关键词： X-ray scattering | Optical polarization | Photonic band gap | Scandium | Transistors | Gallium nitride | MODFETs | Sputtering | Ellipsometry | Aluminum nitride

摘要：-waves. An MBE grown trilayer AIN/ScAIN/AIN thin film | to reverse the piezoelectric orientation in ScAIN | Emerging wireless communication standards call | for higher carrier frequencies, presenting | challenges to frontend filter design for 5G and beyond

关键词： Couplings | Resonator filters | Resonant frequency | Molecular beam epitaxial growth | Switches | Nonhomogeneous media | Film bulk acoustic resonators

关键词：分極反転 | AlN圧電膜 | スパッタ | 弾性波デバイス | 周波数フィルタ

摘要：Genotype and phenotype in mobile organisms can | be defined by various factors such as environmental | , biological and geographical. Brown noddies Anous stolidus | are pan-tropical seabirds breeding at different | times, with migratory and resident populations in six

关键词： Gene flow | Panmictic | Phenotypic plasticity | Reaction norm | Seabird paradox | R-PACKAGE | PHENOTYPIC PLASTICITY | BROWN NODDIES | N-E | INFERENCE...

摘要： ScAIN films theoretically supports k_t~2 up to ～40 | Scandium-doped aluminum nitride (ScAlN) is an | emergent piezoelectric material for acoustic wave devices | , exhibiting higher electromechanical coupling (k_t~2 | ) compared to undoped A1N. The SO Lamb mode in suspended

关键词： Scandium aluminum nitride (ScAIN) | Lamb mode | focusing interdigitated transducer (FIDT) | acoustic delay lines (ADLs)

摘要：The lowest dielectric loss tangent (tanδ | ) reported so far for a scandium-doped aluminum nitride | film with 40 % scandium atomic content (Sc_(0.4)Al_ | (0.6)N) was realized on a molybdenum electrode. The | dielectric loss tangent was reduced down to 0.07 %. about

关键词： Scandium-doped aluminum nitride (ScAIN) | Dielectric loss tangent (tanδ) | Piezoelectric | Microphone | Noise

摘要：In the design of Piezoelectric Micromachined | Ultrasonic Transducers (PMUTs) for wideband immersion | operation, the choice of piezoelectric material is crucial | for determining transducer performance. The | sensitivity, bandwidth, and maximum transmit (TX) pressure

关键词： PMUT | Ultrasonic MEMS | PZT | ScAIN | PVD | Sol-Gel | Characterization | Performance Assessment | Benchmarking

摘要： can be enhanced by replacing the Sc doped A1N (ScAIN | the thickness ratio in A1N and ScAIN* piezoelectric* | the ScAIN* layer exhibits an optimal piezoelectric* | Based on the truth, the electromechanical | coupling in the top and bottom Mo electrodes caped A1N

关键词： Film bulk acoustic resonator | Electromechanical coupling | Sc doped A1N

4008-161-200 800-990-8900

国家科技图书文献中心

摘要：We develop H_2 gas sensors based on CMOS | compatible 20% ScAlN-based pyroelectric detectors | fabricated in-house. Leveraging on the high thermal | conductivity of H_2, ScAlN-based pyroelectric detector is | used in the H_2 sensor for H_2 to conduct away

关键词： hydrogen gas sensor | pyroelectric detector | scandium aluminum nitride | CMOS compatible | sustainable | thermal conductivity

关键词： 分極反転層 | 圧電トランス | ScAIN | レクテナ | 圧電薄膜

摘要：Scandium Aluminum Nitride (ScAIN) is an | optical properties of epitaxial pseudomorphic ScAIN with | attractive material as a barrier layer of GaN HEMTs owing | to its ultrawide bandgap, strong polarization and | ferroelectric. In the paper, the recent progress in the

关键词： X-ray scattering | Optical polarization | Photonic band gap | Scandium | Transistors | Gallium nitride | MODFETs | Sputtering | Ellipsometry | Aluminum nitride

摘要：-waves. An MBE grown trilayer AIN/ScAIN/AIN thin film | to reverse the piezoelectric orientation in ScAIN | Emerging wireless communication standards call | for higher carrier frequencies, presenting | challenges to frontend filter design for 5G and beyond

关键词： Couplings | Resonator filters | Resonant frequency | Molecular beam epitaxial growth | Switches | Nonhomogeneous media | Film bulk acoustic resonators

关键词： 分極反転 | AlN圧電膜 | スパッタ | 弾性波デバイス | 周波数フィルタ

摘要：Genotype and phenotype in mobile organisms can | be defined by various factors such as environmental | , biological and geographical. Brown noddies Anous stolidus | are pan-tropical seabirds breeding at different | times, with migratory and resident populations in six

关键词： Gene flow | Panmictic | Phenotypic plasticity | Reaction norm | Seabird paradox | R-PACKAGE | PHENOTYPIC PLASTICITY | BROWN NODDIES | N-E | INFERENCE...

摘要： ScAIN films theoretically supports k_t~2 up to ～40 | Scandium-doped aluminum nitride (ScAlN) is an | emergent piezoelectric material for acoustic wave devices | , exhibiting higher electromechanical coupling (k_t~2 | ) compared to undoped A1N. The SO Lamb mode in suspended

关键词： Scandium aluminum nitride (ScAIN) | Lamb mode | focusing interdigitated transducer (FIDT) | acoustic delay lines (ADLs)

摘要：The lowest dielectric loss tangent (tanδ | ) reported so far for a scandium-doped aluminum nitride | film with 40 % scandium atomic content (Sc_(0.4)Al_ | (0.6)N) was realized on a molybdenum electrode. The | dielectric loss tangent was reduced down to 0.07 %. about

关键词： Scandium-doped aluminum nitride (ScAIN) | Dielectric loss tangent (tanδ) | Piezoelectric | Microphone | Noise

摘要：In the design of Piezoelectric Micromachined | Ultrasonic Transducers (PMUTs) for wideband immersion | operation, the choice of piezoelectric material is crucial | for determining transducer performance. The | sensitivity, bandwidth, and maximum transmit (TX) pressure

关键词： PMUT | Ultrasonic MEMS | PZT | ScAIN | PVD | Sol-Gel | Characterization | Performance Assessment | Benchmarking

摘要： can be enhanced by replacing the Sc doped A1N (ScAIN | the thickness ratio in A1N and ScAIN piezoelectric | the ScAIN layer exhibits an optimal piezoelectric | Based on the truth, the electromechanical | coupling in the top and bottom Mo electrodes caped A1N

关键词： Film bulk acoustic resonator | Electromechanical coupling | Sc doped A1N

4008-161-200 800-990-8900

国家科技图书文献中心

关键词：分極反転層 | 圧電トランス | ScAIN | レクテナ | 圧電薄膜

摘要：Scandium Aluminum Nitride (ScAIN) is an | optical properties of epitaxial pseudomorphic ScAIN* with* | attractive material as a barrier layer of GaN HEMTs owing | to its ultrawide bandgap, strong polarization and | ferroelectric. In the paper, the recent progress in the

关键词：分極反転 | AlN圧電膜 | スパッタ | 弾性波デバイス | 周波数フィルタ

摘要： can be enhanced by replacing the Sc doped A1N (ScAIN | the thickness ratio in A1N and ScAIN* piezoelectric* | the ScAIN* layer exhibits an optimal piezoelectric* | Based on the truth, the electromechanical | coupling in the top and bottom Mo electrodes caped A1N