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1. Design and Analysis of Guided Surface Acoustic Waves in ScAlN on Sapphire for Phononic Integrated Circuits NSTL国家科技图书文献中心

Jack Guida | Siddhartha Ghosh - 《IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control》 - 2025,72(1) - 44～54 - 共11页 - 被引量：1

摘要：This study presents a comprehensive dispersion analysis and characterization of guided surface acoustic waves (SAWs) in 30% scandium aluminum nitride (ScAlN) alloy thin films on sapphire. The solidly ...

关键词： Surface acoustic waves | Transducers | Electrodes | Dispersion | Substrates | Focusing | Surface impedance | Optical waveguides | Aluminum nitride | Acoustic waveguides

2. Focused Guided Surface Acoustic Waves in 30% Scandium Aluminum Nitride on Silicon Carbide NSTL国家科技图书文献中心

Jack Guida | Siddhartha Ghosh - 《2024 IEEE Ultrasonics,Ferroelectrics,and Frequency Control Joint Symposium (UFFC-JS 2024),Vol.4》 - IEEE Ultrasonics,Ferroelectrics,and Frequency Control Joint Symposium - 2024, - 2462～2465 - 共4页

摘要：Slow-on-fast piezoelectric platforms, which describe the relationship between the phase velocity of a piezoelectric material to its substrate, have facilitated the development of guided surface acoust...

关键词： Acoustic waveguide | Focusing interdigitated transducer | Scandium aluminum nitride | Silicon carbide | Surface acoustic waves

3. Compact Bends and Low-Loss Junctions for S0 Lamb Modes in Fully Etched Scandium Aluminum Nitride Acoustic Waveguides NSTL国家科技图书文献中心

Jack Guida | Ryan Tetro ... - 《2024 IEEE 37th International Conference on Micro Electro Mechanical Systems: IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), 21-25 January 2024, Austin, TX, USA》 - IEEE International Conference on Micro Electro Mechanical Systems - 2024, - 1091～1094 - 共4页

摘要：This work demonstrates the use of focusing interdigitated transducers (FIDTs) to generate confined S0 Lamb modes, in which they are captured and routed by acoustic waveguides. The waveguides demonstra...

关键词： Acoustic waveguides | Transducers | Waveguide junctions | Scandium | Acoustics | Piezoelectric devices | Aluminum nitride

4. 8-25 GHz Broadband Experimental Quality Factor Extraction of 30% ScAlN with Acoustic Delay Lines NSTL国家科技图书文献中心

Gabriel Giribaldi | Luca Colombo ... - 《2024 IEEE Ultrasonics,Ferroelectrics,and Frequency Control Joint Symposium (UFFC-JS 2024),Vol.3》 - IEEE Ultrasonics,Ferroelectrics,and Frequency Control Joint Symposium - 2024, - 1590～1593 - 共4页

摘要：This work reports on the first experimental characterization of the Quality Factor (Q) of the Cross-sectional Lame Mode (CLM) in 30% sC-doped Aluminum Nitride (ScAlN) above the X-band. By utilizing th...

关键词： MEMS | Piezoelectricity | Quality factor | Acoustic delay lines | Resonators

5. Characterization of Acoustic Losses in Interdigitated VHF to mmWave Piezoelectric M/NEMS Resonators NSTL国家科技图书文献中心

Luca Colombo | Gabriel Giribaldi ... - 《2024 IEEE Ultrasonics,Ferroelectrics,and Frequency Control Joint Symposium (UFFC-JS 2024),Vol.2》 - IEEE Ultrasonics,Ferroelectrics,and Frequency Control Joint Symposium - 2024, - 899～902 - 共4页

摘要：This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the characterization of acoust...

关键词： MEMS | NEMS | Resonators | Acoustic losses

6. Low Propagation Loss X-Band Impedance Matched Lamb Mode Delay Lines in 30% Scandium Aluminum Nitride NSTL国家科技图书文献中心

Gabriel Giribaldi | Jack Guida ... - 《2023 IEEE International Ultrasonics Symposium (IUS 2023), Vol.3: Montreal, Quebec, Canada.3-8 September 2023》 - IEEE International Ultrasonics Symposium - 2023, - 2129～2132 - 共4页

摘要：This work presents the first X-band operating Acoustic Delay Lines (ADL) in 30% Sc-doped Aluminum Nitride (ScAlN) employing a Cross-sectional Lame Mode of vibration. Devices operating at 8.3, 9.4, and...

关键词： Acoustic delay lines | Sc-doped AlN | Lamb Waves | Frequency Scaling | Impedance matched

7. Focused SO Lamb Modes for Gigahertz Delay Lines in 30% Scandium Aluminum Nitride NSTL国家科技图书文献中心

Jack Guida | Ryan Tetro ... - 《2023 IEEE International Ultrasonics Symposium (IUS 2023), Vol.3: Montreal, Quebec, Canada.3-8 September 2023》 - IEEE International Ultrasonics Symposium - 2023, - 1623～1626 - 共4页

摘要：Scandium-doped aluminum nitride (ScAlN) is an emergent piezoelectric material for acoustic wave devices, exhibiting higher electromechanical coupling (k_t~2) compared to undoped A1N. The SO Lamb mode ...

关键词： Scandium aluminum nitride (ScAIN) | Lamb mode | focusing interdigitated transducer (FIDT) | acoustic delay lines (ADLs)

8. Analysis of 5-10 GHz Higher-Order Lamb Acoustic Waves in Thin-Film Scandium Aluminum Nitride NSTL国家科技图书文献中心

Sinwoo Cho | Jack Guida ... - 《2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS 2023): Toyama, Japan.15-19 May 2023》 - IEEE International Frequency Control Symposium - 2023, - 345～348 - 共4页

摘要：In this work, we report a systematic analysis of acoustic waves in thin-film 30% scandium-doped aluminum nitride (ScAlN) between S and 10 GHz. Higher-order Lamb mode acoustic delay line (ADL) testbeds...

关键词： Acoustic delay line | Lame mode | Lamb wave | piezoelectric devices | thin-film devices | scandium aluminum nitride

9. Monolithic Integration of X-cut Leaky SAWs and Electrically Small Antennas for RF Passive Wireless Sensors NSTL国家科技图书文献中心

Luca Colombo | Jack Guida ... - 《2023 IEEE International Ultrasonics Symposium (IUS 2023), Vol.1: Montreal, Quebec, Canada.3-8 September 2023》 - IEEE International Ultrasonics Symposium - 2023, - 215～218 - 共4页

摘要：In this work, an on-chip, bulk X-cut Lithium Niobate (LN) platform for the fabrication of monolithical integrated radio frequency (RF) front-ends passives and sensors is presented. Lithographically de...

关键词： MEMS | passive sensing | SAW | IoT | electrically small antennas

10. Shear Horizontal Surface Acoustic Wave FIR Filters in Lithium Niobate on Insulator NSTL国家科技图书文献中心

Jack Guida | Siva Yegnanarayanan ... - 《2022 IEEE International Ultrasonics Symposium (IUS 2022), Vol.4: Venice, Italy.10-13 October 2022》 - IEEE International Ultrasonics Symposium - 2022, - 1843～1846 - 共4页

摘要：This work demonstrates a digitally weighted FIR filter based on guided SH0 acoustic waves in thin film lithium niobate (TFLN) on insulator. An input interdigitated transducer (IDT) is used to launch t...

摘要：This study presents a comprehensive dispersion analysis and characterization of guided surface acoustic waves (SAWs) in 30% scandium aluminum nitride (ScAlN) alloy thin films on sapphire. The solidly ...

关键词： Surface acoustic waves | Transducers | Electrodes | Dispersion | Substrates | Focusing | Surface impedance | Optical waveguides | Aluminum nitride | Acoustic waveguides

摘要：Slow-on-fast piezoelectric platforms, which describe the relationship between the phase velocity of a piezoelectric material to its substrate, have facilitated the development of guided surface acoust...

关键词： Acoustic waveguide | Focusing interdigitated transducer | Scandium aluminum nitride | Silicon carbide | Surface acoustic waves

摘要：This work demonstrates the use of focusing interdigitated transducers (FIDTs) to generate confined S0 Lamb modes, in which they are captured and routed by acoustic waveguides. The waveguides demonstra...

关键词： Acoustic waveguides | Transducers | Waveguide junctions | Scandium | Acoustics | Piezoelectric devices | Aluminum nitride

摘要：This work reports on the first experimental characterization of the Quality Factor (Q) of the Cross-sectional Lame Mode (CLM) in 30% sC-doped Aluminum Nitride (ScAlN) above the X-band. By utilizing th...

关键词： MEMS | Piezoelectricity | Quality factor | Acoustic delay lines | Resonators

摘要：This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the characterization of acoust...

关键词： MEMS | NEMS | Resonators | Acoustic losses

摘要：This work presents the first X-band operating Acoustic Delay Lines (ADL) in 30% Sc-doped Aluminum Nitride (ScAlN) employing a Cross-sectional Lame Mode of vibration. Devices operating at 8.3, 9.4, and...

关键词： Acoustic delay lines | Sc-doped AlN | Lamb Waves | Frequency Scaling | Impedance matched

摘要：Scandium-doped aluminum nitride (ScAlN) is an emergent piezoelectric material for acoustic wave devices, exhibiting higher electromechanical coupling (k_t~2) compared to undoped A1N. The SO Lamb mode ...

关键词： Scandium aluminum nitride (ScAIN) | Lamb mode | focusing interdigitated transducer (FIDT) | acoustic delay lines (ADLs)

摘要：In this work, we report a systematic analysis of acoustic waves in thin-film 30% scandium-doped aluminum nitride (ScAlN) between S and 10 GHz. Higher-order Lamb mode acoustic delay line (ADL) testbeds...

关键词： Acoustic delay line | Lame mode | Lamb wave | piezoelectric devices | thin-film devices | scandium aluminum nitride

摘要：In this work, an on-chip, bulk X-cut Lithium Niobate (LN) platform for the fabrication of monolithical integrated radio frequency (RF) front-ends passives and sensors is presented. Lithographically de...

关键词： MEMS | passive sensing | SAW | IoT | electrically small antennas

摘要：This work demonstrates a digitally weighted FIR filter based on guided SH0 acoustic waves in thin film lithium niobate (TFLN) on insulator. An input interdigitated transducer (IDT) is used to launch t...

关键词： Surface acoustic wave (SAW) | FIR filter | SHO mode | delay line | thin film lithium niobate (TFLN)

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