Takahiro Higuchi |  Akihiko Teshigahara... -  《2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), Vol.1: Kyoto, Japan.25-29 June 2023》 -  International Conference on Solid-State Sensors, Actuators and Microsystems - 2023, - 354～357 - 共4页

摘要：The lowest dielectric loss tangent (tanδ) reported so far for a scandium-doped aluminum nitride film with 40 % scandium atomic content (Sc_(0.4)Al_(0.6)N) was realized on a molybdenum electrode. The d...

关键词： Scandium-doped aluminum nitride (ScAIN) |  Dielectric loss tangent (tanδ) |  Piezoelectric |  Microphone |  Noise

Yuri Kusano |  Itaru Ishii... -  《IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control》 - 2019,66(9) - 1488～1496 - 共9页 - 被引量：18

摘要：In this paper, air-coupled piezoelectric micromachined ultrasonic transducers (PMUTs) using 36% scandium-doped aluminum nitride (ScAlN) thin-film are presented. ScAlN is known to exhibit higher piezoe...

关键词： Silicon |  Aluminum nitride |  III-V semiconductor materials |  Transducers |  Bandwidth |  Resonant frequency |  Acoustics

Yuri Kusano |  Guo-Lun Luo... -  《2018 IEEE International Ultrasonics Symposium (IUS 2018), Vol.3: Kobe(JP).22-25 October 2018》 -  IEEE International Ultrasonics Symposium - 2018, - 1414～1417 - 共4页

摘要：Piezoelectric micromachined ultrasonic transducers (PMUTs) using 36% Scandium-doped aluminum nitride (ScAlN) thin-film are presented in this work. ScAlN is known to exhibit higher piezoelectric proper...

关键词： MEMS |  PMUT |  ultrasonic transducer |  Scandium |  ScAlN

Akihiko Teshigahara |  Toshihiko Takahata... -  《2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Vol.2: Kaohsiung, Taiwan(CN).18-22 June 2017》 -  International Conference on Solid-State Sensors, Actuators and Microsyste-ms - 2017, - 1045～1048 - 共4页

摘要：This paper reports, for the first time, the sensitivity deterioration phenomenon of surface acoustic wave (SAW) sensors for distortion, load, or pressure monitoring. Assuming that the acoustoelastic e...

关键词： SAW |  sensor |  acoustoelastic effect |  scandium aluminum nitride

NSTL主题词： surface acoustic wave sensors

Akira Konno |  Masahiro Sumisaka... -  《2013 IEEE international ultrasonics symposium: IUS 2013, Prague, Czech Republic, 21-25 July 2013, pages 733-1463, [v.2]》 -  IEEE International Ultrasonics Symposium - 2013, - 1378～1381 - 共4页

摘要：Recently, it was reported that the piezoelectric characteristic of AlN was enhanced by doping Sc, and that 40% Sc-doped AlN (Sc_(0.4)Al_(0.6)N) had approximately 5 times higher piezoelectricity than p...

关键词： ScAlN |  Lamb wave |  Resonator |  Micro Electro Mechanical Systems (MEMS)

NSTL主题词： GHZ RANGE |  Resonator Device Component |  etching |  Lamb |  waves

Akira Konno |  Masahiro Sumisaka... -  《2013 IEEE International Ultrasonics Symposium (IUS 2013) : [Volume 2 of 3] Pages 733-1463.》 -  International Ultrasonics Symposium - 2013, - 1378～1381 - 共4页

摘要：Recently, it was reported that the piezoelectric characteristic of AlN was enhanced by doping Sc, and that 40% Sc-doped AlN (Sc_(0.4)Al_(0.6)N) had approximately 5 times higher piezoelectricity than p...

关键词： ScAlN |  Lamb wave |  Resonator |  Micro Electro Mechanical Systems (MEMS)

NSTL主题词： GHZ RANGE |  Resonator Device Component |  Lamb |  etching |  waves

Akihiko Teshigahara |  Ken-ya Hashimoto... -  《2012 IEEE International Ultrasonics Symposium : [Volume 4 of 4] Pages 2420-3131.》 -  International Ultrasonics Symposium - 2012, - 2774～2778 - 共5页

摘要：This paper describes the preparation, characterization and application of scandium doped aluminum nitride (ScAIN) thin film. First, ScAlN thin film is deposited using dual co-sputtering technique. The...

关键词： Highly Piezoelectric Thin Film |  RF SAW Devices |  multi GHz Range

Ken-ya Hashimoto |  Takamasa Fujii... -  《2012 IEEE International Ultrasonics Symposium : [Volume 4 of 4] Pages 2420-3131.》 -  International Ultrasonics Symposium - 2012, - 2746～2749 - 共4页

摘要：This paper describes application of the ScAlN/single crystalline diamond (SCD) structure to wideband surface acoustic wave (SAW) devices operating in 2-3 GHz range. First, it is shown theoretically th...

关键词： SAW |  SCD |  structure

NSTL主题词： surface acoustic wave resonators |  GHZ RANGE |  diamond structure |  Quality factor |  CRYSTALLINE

Kazuki Arakawa |  Takahiko Yanagitani... -  《2010 IEEE International Ultrasonics Symposium. Pages 809-1611》 -  2010 IEEE International Ultrasonics Symposium - 2010, - 1050～1053 - 共4页

摘要：It is difficult to synthesize c-axis tilted ScAlN films by using co-sputtering, because unidirectional oblique incident of sputtered particles is needed to obtain c-axis tilted structure. To realize t...

关键词： component;;ScAlN films;;ScAl alloy target;;c axis tilted films;;RF magnetron sputtering

NSTL主题词： RF magnetron sputtering |  vapour deposition |  liquid phase deposition |  C-axis |  Films

Takahiko Yanagitani |  Kazuki Arakawa... -  《2010 IEEE International Ultrasonics Symposium. Pages 1612-2411》 -  2010 IEEE International Ultrasonics Symposium - 2010, - 2099～2102 - 共4页

摘要：Giant shear mode electromechanical coupling coeficient k_(15)~(') of 0.32 (k_(15)~(2)velence10percent) were found in the c-axis 33 deg tilted ScAIN films. High k_(15) values were observed even in the ...

关键词： component;;ScAlN film;;AlN film;;Thickness shear mode;;Electromechanical coupling coefficient;;BAW resonator;;FBAR;;TCF

NSTL主题词： C-axis |  electromechanical coupling factor |  Gigantism |  giant stars |  Shear |  Shear |  Films